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UHR Field Emission Scanning Electron Microscope
초고해상도 전계방사형 주사전자현미경
  • 호실
    전자현미경실 (115호)
  • 제조사(모델)
    Hitachi (Regulus8230)
  • 담당자
    김화정
  • 이메일
    baby5653@hanmail.net
  • 연락처
    061-450-6151
예약/신청하기
즐겨찾는기기 추가
원리 및 특성

1. This SEM should have Deceleration mode or equivalent which decelerates incidents electrons just before they hit

a specimen.

2. This SEM should be standard-equipped with the function for mixing the detection signals of the top, upper and

lower secondary electron (SE, BSE signal) detectors, and for getting back-scattered electron at the low voltage

(lower than 1kV) region which could require both surface detail and compositional information.

3. This SEM should be equipped with the filtering system for getting low loss BSE signal including compositional

information from top surface of specimen.

4. To effective maintaining high clean vacuum system, this SEM should be equipped magnetic floating type Turbo

Molecular Pump and anti-contamination trap which using for maintenance cost-free.

5. If the gun source needs to exchange within 10 years after installation, the bidder should be response the all

expenses including FE-tip and service charge.

규격

1. Resolution : 0.6nm or less guaranteed at 15kV 

0.7nm or less guaranteed at 1kV 

2. Magnification
1) Photo mode : x20 to x2,000,000 

2) Display mode (on 1920 x 1200 pixels) : Max. x5,000,000 

3. Electron optics :

1) Electron gun : Field emission type electron gun

2) Accelerating voltage : 0.02 to 30kV 

3) Lens system : 3-stage electromagnetic lens, Zoom reduction type

4) Stigmator coil : Octopole electromagnetic system (X, Y)

5) Detector : Tripe or Secondary Electron Detector are built-in.

6) Deceleration voltage : Max. -3.5kV 

4. Specimen stage : Fully Eucentric 5-axis motorized stage

1) Movable range : X - 110mm 

Y - 110mm 

Z - 10mm 

Tilt - -5° to +60° 

Rotation - 360°

2) Maximum loading specimen size : 150dia. 

적용(응용)분야
사용료

표시되지 않은 시료전처리, 재료비 및 분석결과의 특별한 해석을 의뢰할 경우에 별도로 요금을 산정함

 

예약 취소 수수료 안내
- 분석 1일전 취소 : 없음
- 당일취소 : 기기이용 수가의 50%
- 분석 진행중 취소 : 취소불가

구분 항목 단위 교외교내타대학기타 비고
분석의뢰
기본료 20,00020,00020,000
분석료 시료 20,00020,00020,000
추가사용료 (Pt, Au, Carcon 코팅) 10,00010,00010,000
추가사용료 ( Freeze Drying) 시간 5,0005,0005,000
EDS 측정 시료 20,00020,00020,000
EDS Mapping 측정 시료 30,00030,00030,000


관련자료


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